quartz boat
The quartz boat is made from high-purity fused silica and designed for semiconductor diffusion furnaces, oxidation furnaces, annealing systems, and wafer handling processes. It offers excellent thermal shock resistance, high-temperature performance, and chemical stability in ultra-clean environments.
We support full customization, including slot spacing, wafer capacity, wall thickness, dimensions, and CNC machining. Quartz boats are widely used in semiconductor fabrication, solar cell processing, optical fiber production, and research laboratories.