quartz boat
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quartz boat

The quartz boat is made from high-purity fused silica and designed for semiconductor diffusion furnaces, oxidation furnaces, annealing systems, and wafer handling processes. It offers excellent thermal shock resistance, high-temperature performance, and chemical stability in ultra-clean environments.
We support full customization, including slot spacing, wafer capacity, wall thickness, dimensions, and CNC machining. Quartz boats are widely used in semiconductor fabrication, solar cell processing, optical fiber production, and research laboratories.

we can customized all kinds of quartz glass product service
according to your
request/sample/drawing

BrandLianyungang Tuguan Quartz
Production Namequartz boat
Material99.99% Pure Quartz
Thickness0.2-100mm
Processing ServiceBending, Welding, Punching, Cutting, Moulding
Colortransparent
Sizecustomized
Surface Quality60/40
ApplicationOptical/Semi/Industry
Density2.2×103 kg/m3Hardness5.5 – 6.5 Mohs’ Scale 570 KHN 100
Design Tensile Strength4.8×107 Pa (N/m2) (7000 psi)Design Compressive StrengthGreater than 1.1 x l09 Pa (160,000 psi)SMD 5730
Bulk Modulus3.7×1010 Pa (5.3×106 psi)Rigidity Modulus3.1×1010 Pa (4.5×106 psi)
Softening Point1730°CAnnealing Point1215°C
  1. SiO2> 99.99% ,high purity quartz tube.
  2. Operating Temperature: 1250℃ SoftenTemperature: 1730℃.
  3. Excellent visual and chemical performance .
  4. without surface coating and infectant.
  5. Health care and environmental protection
  6. Any dimension can be made.
  7. CE.RoHs SGS approved.

Frequently asked questions

Quartz boats are used for holding and transporting wafers or samples inside diffusion furnaces, oxidation furnaces, annealing equipment, and other high-temperature semiconductor processing tools.

They are manufactured from 99.99% high-purity fused silica, suitable for semiconductor-grade thermal processes.

Yes. We offer precision CNC cutting, slotting, polishing, grinding, welding, and bending to meet advanced semiconductor requirements.

Yes. Slot width, spacing, angle, and capacity can be customized according to wafer size (2–12 inch) and equipment requirements.

Quartz boats withstand continuous temperatures up to 1050°C and short-term peaks around 1200°C, making them ideal for diffusion and oxidation processes.

Please provide drawings or details such as length, width, height, slot spacing, wafer size, wall thickness, and quantity. Photos or samples improve accuracy.