石英舟
quartz boat - 图片 2
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石英舟

石英舟由高純度熔融石英製成，設計用於半導體擴散爐、氧化爐、退火系統，以及晶片處理流程。它在極為潔淨的環境中提供卓越的耐熱衝擊性、耐高溫性能與化學穩定性。
我們提供全面客製化，包括槽寬距、晶圓容量、壁厚、尺寸，以及 CNC 加工。熔融石英舟在半導體製造、太陽能電池處理、光纖生產與研究實驗室中被廣泛使用。

我們可以客製化各種石英玻璃產品服務
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請求/樣品/圖

品牌Lianyungang Tuguan 熔融石英
產品名稱石英舟
材料99.99% 純淨石英
厚度0.2-100mm
處理服務彎曲、焊接、沖孔、切割、成型
顏色透明
尺寸客製化
Surface Quality60/40
應用光學/半導體/產業
密度2.2×103 kg/m3硬度5.5 – 6.5 Mohs’ Scale 570 KHN 100
設計抗拉強度4.8×107 Pa (N/m2) (7000 psi)Design Compressive StrengthGreater than 1.1 x l09 Pa (160,000 psi)SMD 5730
Bulk Modulus3.7×1010 Pa (5.3×106 psi)Rigidity Modulus3.1×1010 Pa (4.5×106 psi)
Softening Point1730°CAnnealing Point1215°C
  1. SiO2> 99.99% ,high purity quartz tube.
  2. Operating Temperature: 1250℃ SoftenTemperature: 1730℃.
  3. Excellent visual and chemical performance .
  4. without surface coating and infectant.
  5. Health care and environmental protection
  6. Any dimension can be made.
  7. CE.RoHs SGS approved.

常見問題

Quartz boats are used for holding and transporting wafers or samples inside diffusion furnaces, oxidation furnaces, annealing equipment, and other high-temperature semiconductor processing tools.

They are manufactured from 99.99% high-purity fused silica, suitable for semiconductor-grade thermal processes.

Yes. We offer precision CNC cutting, slotting, polishing, grinding, welding, and bending to meet advanced semiconductor requirements.

Yes. Slot width, spacing, angle, and capacity can be customized according to wafer size (2–12 inch) and equipment requirements.

Quartz boats withstand continuous temperatures up to 1050°C and short-term peaks around 1200°C, making them ideal for diffusion and oxidation processes.

Please provide drawings or details such as length, width, height, slot spacing, wafer size, wall thickness, and quantity. Photos or samples improve accuracy.