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Upgrade your semiconductor processing with our high-purity fused silica quartz bell jars. Specifically designed for CVD (Chemical Vapor Deposition) and plasma reaction environments, these chambers offer exceptional thermal stability and chemical resistance. Each unit features a precision-welded gas inlet side arm and an integrated internal distributor to ensure uniform gas flow across the wafer surface. Whether you are scaling up production or conducting R&D, our CNC-machined quartz solutions provide the vacuum integrity and purity your process demands.
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石英ボートは高純度の溶融シリカから作られており、半導体拡散炉、酸化炉、アニーリングシステム、ウェーハの取り扱いプロセス向けに設計されています。熱衝撃耐性に優れ、高温での性能と超クリーンな環境での化学的安定性を提供します。
私たちは、スロット間隔、ウェハー容量、壁厚、寸法、および CNC 加工を含む、完全なカスタマイズをサポートします。溶融石英のボートは、半導体製造、太陽電池加工、光ファイバ製造、研究機関で広く使用されています。
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Upgrade your semiconductor processing with our high-purity fused silica quartz bell jars. Specifically designed for CVD (Chemical Vapor Deposition) and plasma reaction environments, these chambers offer exceptional thermal stability and chemical resistance. Each unit features a precision-welded gas inlet side arm and an integrated internal distributor to ensure uniform gas flow across the wafer surface. Whether you are scaling up production or conducting R&D, our CNC-machined quartz solutions provide the vacuum integrity and purity your process demands.
